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Tetrakis(dimethylamido)zirconium(IV)
Synonym(s):
Tetrakis(dimethylamino)zirconium(IV)
Linear Formula:
[(CH
3
)
2
N]
4
Zr
CAS Number:
19756-04-8
Molecular Weight:
267.53
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579211
Tetrakis(dimethylamido)zirconium(IV),
electronic grade, ≥99.99% trace metals basis
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669016
Tetrakis(dimethylamido)zirconium(IV),
packaged for use in deposition systems
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