Fabrication of implantable microelectrode arrays by laser cutting of silicone rubber and platinum foil.

Fabrication of implantable microelectrode arrays by laser cutting of silicone rubber and platinum foil.

Journal of neural engineering (2005-05-07)

M Schuettler, S Stiess, B V King, G J Suaning

ABSTRACT

A new method for fabrication of microelectrode arrays comprised of traditional implant materials is presented. The main construction principle is the use of spun-on medical grade silicone rubber as insulating substrate material and platinum foil as conductor (tracks, pads and electrodes). The silicone rubber and the platinum foil are patterned by laser cutting using an Nd:YAG laser and a microcontroller-driven, stepper-motor operated x-y table. The method does not require expensive clean room facilities and offers an extremely short design-to-prototype time of below 1 day. First prototypes demonstrate a minimal achievable feature size of about 30 microm.

MATERIALS

Product Number

Brand

Product Description

267244

Sigma-Aldrich

Platinum, foil, thickness 0.025 mm, 99.9% trace metals basis

GF30259357

Platinum, foil, 25x25mm, thickness 0.125mm, as rolled, 99.95%

GF04529538

Platinum, foil, 50x50mm, thickness 0.125mm, as rolled, 99.99+%

GF00187163

Platinum, foil, 0.1m coil, thickness 0.15mm, coil width .9mm, as rolled, 99.99%

GF55534046

Platinum, foil, 0.05m coil, thickness 0.029mm, coil width .34mm, annealed, 99.99%

GF15087203

Platinum, foil, 0.1m coil, thickness 0.025mm, coil width 1.6mm, as rolled, 99.95%

GF72782231

Platinum, foil, 50x50mm, thickness 0.1mm, as rolled, 99.99+%

GF83172269

Platinum, foil, 0.05m coil, thickness 0.025mm, coil width .4mm, as rolled, 99.95%

GF72566657

Platinum, foil, 0.1m coil, thickness 0.029mm, coil width .34mm, annealed, 99.99%

GF25102897

Platinum, foil, 0.5m coil, thickness 0.045mm, coil width .75mm, as rolled, 99.95%

GF96238570

Platinum, foil, not light tested, 50x50mm, thickness 0.01mm, as rolled, 99.95%

GF87686173

Platinum, foil, 30x30mm, thickness 0.2mm, as rolled, 99.95%

GF35428406

Platinum, foil, 15x15mm, thickness 0.2mm, as rolled, 99.95%

GF92036235

Platinum, foil, 25x25mm, thickness 0.125mm, as rolled, 99.99+%

GF33460084

Platinum, foil, not light tested, 50x50mm, thickness 0.0025mm, as rolled, 99.95%

GF57762399

Platinum, foil, not light tested, 50x50mm, thickness 0.005mm, as rolled, 99.95%

GF45750944

Platinum, foil, not light tested, 25x25mm, thickness 0.0075mm, as rolled, 99.95%

GF52150801

Platinum, foil, 0.5m coil, thickness 0.029mm, coil width .34mm, annealed, 99.99%

GF69099610

Platinum, foil, light tested, 50x50mm, thickness 0.05mm, as rolled, 99.95%

GF39989176

Platinum, foil, not light tested, 25x25mm, thickness 0.00075mm, permanent polyester support, 99.85%

GF39448873

Platinum, foil, light tested, 50x50mm, thickness 0.005mm, as rolled, 99.95%

GF35841584

Platinum, foil, not light tested, 100x100mm, thickness 0.003mm, as rolled, 99.95%

GF30684540

Platinum, foil, not light tested, 25x25mm, thickness 0.004mm, as rolled, 99.95%

GF07973961

Platinum, foil, 0.5m coil, thickness 0.025mm, coil width .85mm, as rolled, 99.95%

GF61053476

Platinum, foil, 0.2m coil, thickness 0.025mm, coil width 5mm, as rolled, 99.95%

GF68611237

Platinum, foil, 0.2m coil, thickness 0.029mm, coil width .34mm, annealed, 99.99%

GF13420257

Platinum, foil, 0.5m coil, thickness 0.025mm, coil width 5mm, as rolled, 99.95%

GF02102948

Platinum, foil, light tested, 25x25mm, thickness 0.025mm, as rolled, 99.99+%

GF83202083

Platinum, foil, 0.2m coil, thickness 0.045mm, coil width .75mm, as rolled, 99.95%

GF02450180

Platinum, foil, not light tested, 50x50mm, thickness 0.00075mm, permanent polyester support, 99.85%