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mfcd00048006

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Keyword:'mfcd00048006'
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Synonym(s): (Me2N)3SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane, Tris(dimethylamino)silane
Linear Formula: ((CH3)2N)3SiH
CAS No.:
15112-89-7
Molecular Weight:
161.32
EC No.:
239-165-0
CompareProduct No.DescriptionSDSPricing
570133electronic grade, 99.999%
759562packaged for use in deposition systems
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