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  • Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region.

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region.

Optics express (2012-11-29)
Mónica Fernández-Perea, Regina Soufli, Jeff C Robinson, Luis Rodríguez-De Marcos, Jose A Méndez, Juan I Larruquert, Eric M Gullikson
ABSTRACT

We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

MATERIALS
Product Number
Brand
Product Description

Sigma-Aldrich
Silicon carbide, −400 mesh particle size, ≥97.5%
Sigma-Aldrich
Silicon carbide, nanopowder, <100 nm particle size
Sigma-Aldrich
Silicon carbide, -200 mesh particle size