Skip to Content
Merck
All Photos(1)

Key Documents

View All Documentation

Safety Information

759414

Sigma-Aldrich

Tetraethyl orthosilicate

packaged for use in deposition systems

Synonym(s):

Tetraethyl orthosilicate, Orthosilicic acid tetraethyl ester, Silicon tetraethoxide, Tetraethoxysilane, Tetraethoxysilicon(IV), Tetraethyl silicate, TEOS

Sign Into View Organizational & Contract Pricing
All Photos(1)

About This Item

Linear Formula:
Si(OC2H5)4
CAS Number:
78-10-4
Molecular Weight:
208.33
Beilstein:
1422225
EC Number:
201-083-8
MDL number:
MFCD00009062
UNSPSC Code:
12352103
PubChem Substance ID:
329766783
NACRES:
NA.23

vapor density

7.2 (vs air)

Quality Level

100

vapor pressure

<1 mmHg ( 20 °C)

Assay

≥99.5% (GC)

form

liquid

refractive index

n20/D 1.382 (lit.)

bp

168 °C (lit.)

density

0.933 g/mL at 20 °C (lit.)

SMILES string

CCO[Si](OCC)(OCC)OCC

InChI

1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3

InChI key

BOTDANWDWHJENH-UHFFFAOYSA-N

Looking for similar products? Visit Product Comparison Guide

Application

Tetraethyl orthosilicate (TEOS) is an oxygen containing precursor of Si used for the deposition of:
  • Si oxide
  • Oxycarbide
  • Doped silicate
  • Silanol
  • Siloxane polymer
  • Organosilicon thin films

The films can be deposited at low temperatues (<250 °C). TEOS is also used to deposit mesoporous and nanoporous thin films of silica. These porous films can be doped during deposition to further enhance their properties.
Commonly used as a precursor to prepare xerogel
Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.

Pictograms

FlameExclamation mark
GHS02,GHS07

Signal Word

Warning

Hazard Statements

H226,H319,H332,H335

Hazard Classifications

Acute Tox. 4 Inhalation - Eye Irrit. 2 - Flam. Liq. 3 - STOT SE 3

Target Organs

Respiratory system

Storage Class Code

3 - Flammable liquids

WGK

WGK 1

Flash Point(F)

113.0 °F - closed cup

Flash Point(C)

45 °C - closed cup

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

FSL

Group 4: Flammable liquids
Type 2 petroleums
Hazardous rank III
Water insoluble liquid

ISHL Indicated Name

Substances Subject to be Indicated Names

ISHL Notified Names

Substances Subject to be Notified Names

JAN Code

759414-25ML:
759414-VAR:
759414-BULK:

Choose from one of the most recent versions:

Certificates of Analysis (COA)

Lot/Batch Number
MKCP3465
SHBK9149
MKBF9200V

Don't see the Right Version?

If you require a particular version, you can look up a specific certificate by the Lot or Batch number.

Search for a COA

Already Own This Product?

Find documentation for the products that you have recently purchased in the Document Library.

Visit the Document Library

Andreas Kay et al.
Journal of the American Chemical Society, 128(49), 15714-15721 (2006-12-07)
Thin films of silicon-doped Fe2O3 were deposited by APCVD (atmospheric pressure chemical vapor deposition) from Fe(CO)5 and TEOS (tetraethoxysilane) on SnO2-coated glass at 415 degrees C. HRSEM reveals a highly developed dendritic nanostructure of 500 nm thickness having a feature
Nils R Blumenthal et al.
Proceedings of the National Academy of Sciences of the United States of America, 111(45), 16124-16129 (2014-10-29)
Extracellular soluble signals are known to play a critical role in maintaining neuronal function and homeostasis in the CNS. However, the CNS is also composed of extracellular matrix macromolecules and glia support cells, and the contribution of the physical attributes
Seong Cheol Hong et al.
International journal of nanomedicine, 6, 3219-3231 (2012-01-13)
Superparamagnetic iron oxide nanoparticles (SPIONs) have been widely utilized for the diagnosis and therapy of specific diseases, as magnetic resonance imaging (MRI) contrast agents and drug-delivery carriers, due to their easy transportation to targeted areas by an external magnetic field.
Tom Hasell et al.
Advanced materials (Deerfield Beach, Fla.), 24(42), 5732-5737 (2012-08-30)
Macroscopic inorganic porous beads are imbibed with a "porous molecular additive" by simple solution processing techniques, resulting in controllable loading and increased surface area. The porous additive consists of soluble organic cage molecules that precipitate as microporous crystals when solutions
Lin Lin et al.
Colloids and surfaces. B, Biointerfaces, 101, 97-100 (2012-07-17)
Hollow silica spheres with round mesoporous shells were synthesized by core-shell template method, using monodispersed cationic polystyrene particles as core, and TEOS (tetraethoxysilane) as the silica source to form shell. After calcination at 550°C, uniform spheres with a thin shell
View All Related Papers

Our team of scientists has experience in all areas of research including Life Science, Material Science, Chemical Synthesis, Chromatography, Analytical and many others.

Contact Technical Service