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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

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Synonym(s):
PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
Beilstein/REAXYS Number:
3678999
EC Number:
MDL number:
PubChem Substance ID:
NACRES:
NA.23

form

liquid

refractive index

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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This Item
339113697222668990
Tantalum(V) ethoxide packaged for use in deposition systems

760404

Tantalum(V) ethoxide

Tantalum(V) ethoxide 99.98% trace metals basis

339113

Tantalum(V) ethoxide

Tantalum(V) oxide −60 mesh, 99.5%

697222

Tantalum(V) oxide

mp

21 °C (lit.)

mp

21 °C (lit.)

mp

-

mp

-

density

1.566 g/mL at 25 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

density

8.2 g/mL at 25 °C (lit.)

density

1.252 g/mL at 25 °C (lit.)

refractive index

n20/D 1.487 (lit.)

refractive index

n20/D 1.487 (lit.)

refractive index

-

refractive index

-

bp

155 °C/0.01 mmHg (lit.)

bp

155 °C/0.01 mmHg (lit.)

bp

-

bp

-

Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

pictograms

Flame

signalword

Warning

hcodes

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

wgk_germany

WGK 1

flash_point_f

84.2 °F - closed cup

flash_point_c

29 °C - closed cup


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