- Synthesis of large-area MoS2 atomic layers with chemical vapor deposition.
Synthesis of large-area MoS2 atomic layers with chemical vapor deposition.
Advanced materials (Deerfield Beach, Fla.) (2012-04-03)
Yi-Hsien Lee, Xin-Quan Zhang, Wenjing Zhang, Mu-Tung Chang, Cheng-Te Lin, Kai-Di Chang, Ya-Chu Yu, Jacob Tse-Wei Wang, Chia-Seng Chang, Lain-Jong Li, Tsung-Wu Lin
PMID22467187
ABSTRACT
Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.
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