469858

Tetrakis(dimethylamido)titanium(IV)

99.999% trace metals basis

• 동의어(들): TDMAT, Tetrakis(dimethylamino)titanium(IV)
• Linear Formula: [(CH₃)₂N]₄Ti
• CAS 번호: 3275-24-9
• Molecular Weight: 224.17
• EC Number: 221-904-3
• MDL number: MFCD00014861
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24870618
• NACRES: NA.23

속성

• Quality Level: 200
• 분석: 99.999% trace metals basis
• 양식: liquid
• 반응 적합성: core: titanium
• bp: 50 °C/0.5 mmHg (lit.)
• density: 0.947 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

설명

일반 설명

Tetrakis(dimethylamido)titanium(IV) [Ti(N(CH₃)₂)₄], or TDMAT, is a volatile, colourless to pale yellow liquid. Its high volatility and thermal stability make it suitable for chemical vapor deposition (CVD) and atomic layer deposition (ALD), enabling the controlled deposition of titanium-based films such as titanium nitride (TiN) and titanium dioxide (TiO₂). It also supports uniform film growth at low temperatures, making it compatible with temperature-sensitive substrates

애플리케이션

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

특징 및 장점

• 99.999% trace metals basis ensures superior quality of deposited films, with minimal defects and consistent properties, critical for microelectronics and optoelectronics applications.
• High purity reduces the risk of contamination during the coating process, leading to enhanced adhesion, durability, and performance of the final products.
• The absence of impurities allows for the precise control of particle size and morphology, improving the effectiveness of nanoparticles in targeted applications.
• High purity ensures that electronic properties are not compromised by impurities, enhancing device performance and reliability.
• Controlling heavy metals at ppb levels ensures effective contamination control, regulatory compliance, and optimized performance.

안전성 정보

• 픽토그램: GHS02,GHS05
• 신호어: Danger
• 유해 및 위험 성명서: H225,H260,H314
• 예방조치 성명서: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• 보충제 위험성: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point (°F): -22.0 °F - closed cup
• Flash Point (°C): -30 °C - closed cup
• 개인 보호 장비: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter