751774

Tris(diethylamido)(tert-butylimido)niobium(V)

packaged for use in deposition systems

• Synonym(s): (tert)-Butyliminotris(diethylamino)niobium, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-niobium, t-Butylimido tris(diethylamido)niobium(V)
• Linear Formula: ((CH₃)₆N)₃NbN(CH₃)₃
• CAS Number: 210363-27-2
• Molecular Weight: 380.41
• MDL number: MFCD16659983
• UNSPSC Code: 12352103
• PubChem Substance ID: 329766236
• NACRES: NA.23

Properties

• Quality Level: 100
• form: liquid
• reaction suitability: core: niobium
• density: 1.015 g/mL at 25 °C
• SMILES string: CCN(CC)[Nb](=NC(C)(C)C)(N(CC)CC)N(CC)CC
• InChI: 1S/C4H9N.3C4H10N.Nb/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
• InChI key: CBCDPJRPMPTFKA-UHFFFAOYSA-N

Description

General description

Tris(diethylamido)(tert-butylimido)niobium(V) (TBTDEN) is a volatile, thermally stable liquid used as a niobium precursor for thin-film deposition. It offers high vapor pressure and clean decomposition, making it ideal for applications requiring materials with high dielectric constants and robust barrier layers.

Application

Tris(diethylamido)(tert-butylimido)niobium(V) is used as a niobium precursor

• In atomic layer deposition to create niobium-doped tin oxide (NTO), a conductive material. These NTO scaffolds provide a large surface area for thin platinum layers, improving electron transfer in dye-sensitized solar cells.
• In metal-organic chemical vapor deposition (MOCVD) to grow niobium nitride (NbN) thin films. These films, deposited on silicon wafers, offers good conductivity and are suitable for electronic applications such as gate stacks.

Safety Information

• pictograms: GHS02,GHS07
• signalword: Danger
• hcodes: H225,H261,H319,H335
• pcodes: P210 - P231 + P232 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Flam. Liq. 2 - STOT SE 3 - Water-react 2
• target_organs: Respiratory system
• Storage Class: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• wgk_germany: WGK 3
• flash_point_f: 26.6 °F - closed cup
• flash_point_c: -3 °C - closed cup