NIST2133

Phosphorus implant in silicon depth profile standard

NIST^® SRM^® 2133

• UNSPSCコード: 41116107
• NACRES: NA.24

特性

• グレード: certified reference material
• 品質水準: 100
• 包装: pkg of each
• メーカー／製品名: NIST^®
• アプリケーション: semiconductor
• フォーマット: matrix material

詳細

詳細

This Standard Reference Material (SRM) is intended for use in calibrating secondary ion response to minor and trace levels of phosphorus in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). SRM 2133 is intended for calibrating the response of a SIMS instrument for phosphorus in a silicon matrix under a specific set of instrumental conditions. It may also be used by a laboratory as a transfer standard for the calibration of working standards of phosphorus in silicon. This SRM consists of a 1 cm × 1 cm single crystal silicon substrate that has been ion-implanted with the isotope 31P at a nominal energy of 100 keV. For more information, please refer to the COA and SDS.

SRM 2133_cert

SRM 2133_SDS

その他情報

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Phosphorus (³¹P)

法的情報

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology

安全性情報

• 保管分類コード: 13 - Non Combustible Solids
• WGK: WGK 3
• 引火点(°F): Not applicable
• 引火点(℃): Not applicable