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About This Item
Linear Formula:
Ta(N(CH3)2)5
CAS Number:
Molecular Weight:
401.33
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23
assay
99.99%
form
solid
reaction suitability
core: tantalum
reagent type: catalyst
mp
100 °C (dec.) (lit.)
SMILES string
CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C
InChI
1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
InChI key
VSLPMIMVDUOYFW-UHFFFAOYSA-N
General description
Atomic number of base material: 73 Tantalum
Features and Benefits
Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process. Ta2O5 thins films show promise as gate dielectric materials in the manufacture of integrated circuits.
signalword
Danger
hcodes
Hazard Classifications
Eye Dam. 1 - Flam. Sol. 1 - Skin Corr. 1B - Water-react 1
Storage Class
4.3 - Hazardous materials which set free flammable gases upon contact with water
wgk_germany
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges
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