454516

Tetrakis(trimethylsilyloxy)silane

97%

• 別名: 1,1,1,5,5,5-Hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane, Tetrakis(trimethylsilyl) silicate
• 化学式: [(CH₃)₃SiO]₄Si
• CAS番号: 3555-47-3
• 分子量: 384.84
• EC Number: 222-613-4
• MDL番号: MFCD00051587
• UNSPSCコード: 12352103
• PubChem Substance ID: 24868927
• NACRES: NA.22

特性

• 品質水準: 100
• アッセイ: 97%
• 屈折率: n20/D 1.389 (lit.)
• bp: 103-106 °C/2 mmHg (lit.)
• 密度: 0.87 g/mL at 25 °C (lit.)
• SMILES記法: C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C
• InChI: 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3
• InChI Key: VNRWTCZXQWOWIG-UHFFFAOYSA-N

詳細

アプリケーション

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

安全性情報

• ピクトグラム: GHS07
• シグナルワード: Warning
• 危険有害性情報: H315,H319,H335
• 注意書き: P261 - P264 - P271 - P280 - P302 + P352 - P305 + P351 + P338
• 危険有害性の分類: Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
• ターゲットの組織: Respiratory system
• 保管分類コード: 10 - Combustible liquids
• WGK: WGK 3
• 引火点(°F): 168.8 °F - closed cup
• 引火点(℃): 76 °C - closed cup
• 個人用保護具 (PPE): Eyeshields, Gloves, type ABEK (EN14387) respirator filter