496863

Pentakis(dimethylamino)tantalum(V)

99.99%

• 동의어(들): PDMAT, TADMA, Ta(NMe₂)₅, Tantalum dimethylamide
• Linear Formula: Ta(N(CH₃)₂)₅
• CAS Number: 19824-59-0
• Molecular Weight: 401.33
• MDL number: MFCD01631286
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24873088
• NACRES: NA.23

속성

• Quality Level: 100
• 분석: 99.99%
• 형태: solid
• 반응 적합성: core: tantalum; reagent type: catalyst
• mp: 100 °C (dec.) (lit.)
• SMILES string: CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C
• InChI: 1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
• InChI key: VSLPMIMVDUOYFW-UHFFFAOYSA-N

설명

일반 설명

Atomic number of base material: 73 Tantalum

특징 및 장점

Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta₂O₅) thin films when O₂, H₂O, NO or H₂O₂ is present during the deposition process. Ta₂O₅ thins films show promise as gate dielectric materials in the manufacture of integrated circuits.

안전성 정보

• 픽토그램: GHS02,GHS05
• 신호어: Danger
• 유해 및 위험 성명서: H228,H260,H314
• 예방조치 성명서: P210 - P231 + P232 - P260 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Eye Dam. 1 - Flam. Sol. 1 - Skin Corr. 1B - Water-react 1
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point (°F): Not applicable
• Flash Point (°C): Not applicable
• 개인 보호 장비: Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges