579211

Tetrakis(dimethylamido)zirconium(IV)

electronic grade, ≥99.99% trace metals basis

• 동의어(들): TDMAZ, Tetrakis(dimethylamino)zirconium(IV)
• Linear Formula: [(CH₃)₂N]₄Zr
• CAS Number: 19756-04-8
• Molecular Weight: 267.53
• MDL number: MFCD00239502
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24880977
• NACRES: NA.23

속성

• Grade: electronic grade
• Quality Level: 100
• 분석: ≥99.99% trace metals basis
• 양식: solid
• 반응 적합성: core: zirconium
• mp: 57-60 °C (lit.)
• 저장 온도: 2-8°C
• SMILES string: CN(C)[Zr](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Zr/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: DWCMDRNGBIZOQL-UHFFFAOYSA-N

설명

애플리케이션

Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.

안전성 정보

• 픽토그램: GHS02,GHS07
• 신호어: Danger
• 유해 및 위험 성명서: H228,H261,H315,H319,H335
• 예방조치 성명서: P210 - P223 - P231 + P232 - P240 - P302 + P352 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Flam. Sol. 1 - Skin Irrit. 2 - STOT SE 3 - Water-react 2
• 표적 기관: Respiratory system
• 보충제 위험성: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point (°F): No data available
• Flash Point (°C): No data available
• 개인 보호 장비: Eyeshields, Gloves, type P3 (EN 143) respirator cartridges